Lightsmyth纳米图案硅图章 (纳米图案硅片).pdf
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LightSmyth提供了大量的纳米加工单晶硅衬底，为工业和学术机构提供了一个低成本的纳米光子学研究入口。基底可用于光学、光子学、生物学、化学、物理学（如中子散射）、聚合物研究、纳米印迹、微流体学等领域。如果需要，基板可以涂上金属或介质涂层。大多数地表特征具有略微梯形的横截面轮廓，具有直线平行的台地和沟渠。晶格状结构也可用。提供了许多特征尺寸和沟槽深度。基板的扫描电镜图像可以在装运前拍摄，以验证准确的轮廓。
Nanopatterned Silicon Stamps
II-VI offers a large variety of nanomachined single crystal silicon substrates providing a low-cost entry into nanophotonics research for industry and academic institutions. The substrates may be used in a variety of applications in optics, photonics, biology, chemistry, physics (e.g. neutron scattering), polymer research, nanoimprinting, microfluidics and others. If desired, the substrates can be coated with metallic or dielectric coating. Most of the surface features have slightly trapezoidal cross-section profiles with straight parallel mesas and trenches. Lattice-like structures are available as well. A number of feature sizes and trench depth is available. SEM images of the substrates may be taken prior to shipment to verify the exact profile.
Dimensions shown in the table represent target value. Period has accuracy better than 0.5% while groove depth and the width of line and space may differ from the target values by 15%. SEM are given for illustration purposes. If more precise dimensional information is required, we may provide an SEM of the specific piece of nanostamp you order as an optional service
(LightSmyth Nanopatterned Silicon Stamps 纳米图案硅片)
描述 | 数据 |
基材宽度高度误差 | 标准公差±0.2 mm |
净孔径（CA） | 距基板边缘0.5 mm（图案可延伸至基板边缘） |
基底厚度 | 0.675 ± 0.050 mm |
CA的表面质量 | P／N以“p”结尾：划痕/挖：最大划痕宽度，最大最大直径。可提供高达20/10的规格 |
CA的表面质量 | P/N以“-S”结尾：由于表面质量而打折的等级。至少有80%的可用面积。可能出现80/100划痕/挖痕/颗粒和不规则基底形状 |
CA外表面质量 | 无要求 |
Material材料 | 单晶硅，反应离子刻蚀 |
2D Nanostamps
Part Number | 周期 Period(nm) | 晶体类型 Lattice Type | 槽深 Groove Depth(nm) | 特征宽度 Feature Width(nm) | Size(mm) |
S2D-18B2-0808-350-P | 600 | Rect Post | 350 | 275 | 8.0 x 8.3 |
S2D-18B3-0808-350-P | 700 | Rect Post | 350 | 350 | 8.0 x 8.3 |
S2D-18C2-0808-350-P | 600 | Hex Post | 350 | 240 | 8.0 x 8.3 |
S2D-18C3-0808-150-P | 700 | Hex Post | 150 | 290 | 8.0 x 8.3 |
S2D-18C3-0808-350-P | 700 | Hex Post | 350 | 290 | 8.0 x 8.3 |
S2D-18D3-0808-350-P | 700 | Hex Hole | 350 | 200 | 8.0 x 8.3 |
S2D-24B2-0808-150-P | 600 | Rect Post | 150 | 195 | 8.0 x 8.3 |
S2D-24B2-0808-350-P | 600 | Rect Post | 350 | 195 | 8.0 x 8.3 |
S2D-24B3-0808-150-P | 700 | Rect Post | 150 | 260 | 8.0 x 8.3 |
S2D-24B3-0808-350-P | 700 | Rect Post | 350 | 260 | 8.0 x 8.3 |
S2D-24C2-0808-150-P | 600 | Hex Post | 150 | 165 | 8.0 x 8.3 |
S2D-24C2-0808-350-P | 600 | Hex Post | 350 | 165 | 8.0 x 8.3 |
S2D-24C3-0808-150-P | 700 | Hex Post | 150 | 220 | 8.0 x 8.3 |
S2D-24D2-0808-150-P | 600 | Hex Hole | 150 | 180 | 8.0 x 8.3 |
S2D-24D2-0808-350-P | 600 | Hex Hole | 350 | 180 | 8.0 x 8.3 |
S2D-24D3-0808-150-P | 700 | Hex Hole | 150 | 290 | 8.0 x 8.3 |
S2D-24D3-0808-350-P | 700 | Hex Hole | 350 | 290 | 8.0 x 8.3 |
Linear Nanostamps (line+space)
型号 | 周期间隔(nm) | 槽深 (nm) | 占空比 | 线宽 (nm) | 尺寸 | SEM link1 | Top down |
SNS-C72-1212-50-P | 139 | 50 | 50% | 69.5 | 12.5×12.5×0.7 | X-sec | Top down |
SNS-C72-2525-50-P | 139 | 50 | 50% | 69.5 | 25×25×0.7 5 | X-sec | Top down |
SNS-C36-1212-110-P | 278 | 110 | 50% | 139 | 12.5×12.5×0.7 | X-sec | Top down |
SNS-C24-1212-110-P | 416.6 | 110 | 50% | 208 | 12.5×12.5×0.7 | X-sec | Top down |
SNS-C20-0808-150-D45-P | 500 | 150 | 44% | 220 | 8×8.3×0.7 | Top down | |
SNS-C20-0808-350-D45-P | 500 | 350 | 44% | 220 | 8×8.3×0.7 | Top down | |
SNS-C20-0808-150-D60-P | 500 | 150 | 60% | 300 | 8×8.3×0.7 | Top down | |
SNS-C20-0808-350-D60-P | 500 | 350 | 60% | 300 | 8×8.3×0.7 | Top down | |
SNS-C18-2009-110-D50-P | 555.5 | 110 | 50% | 278 | 20×9×0.7 | X-sec | Top down |
SNS-C18-2009-140-D50-P | 555.5 | 140 | 50% | 278 | 20×9×0.7 | X-sec | Top down |
SNS-C18-2009-110-D29-P | 555.5 | 110 | 29% | 158 | 20×9×0.7 | X-sec | Top down |
SNS-C18-2009-140-D29-P | 555.5 | 140 | 29% | 158 | 20×9×0.7 | X-sec | Top down |
SNS-C16.7-0808-150-D45-P | 600 | 150 | 43% | 260 | 8×8.3×0.7 | Top down | |
SNS-C16.7-0808-350-D45-P | 600 | 350 | 43% | 260 | 8×8.3×0.7 | Top down | |
SNS-C16.7-0808-150-D55-P | 600 | 150 | 55% | 330 | 8×8.3×0.7 | Top down | |
SNS-C16.7-0808-350-D55-P | 600 | 350 | 55% | 330 | 8×8.3×0.7 | Top down | |
SNS-C16.5-2912-190-P | 606 | 190 | 50% | 303 | 29×12×0.7 | X-sec | Top down |
SNS-C16.5-2912-190-S 4 | 606 | 190 | 50% | 303 | 29×12×0.7 | X-sec | Top down |
SNS-C16.5-2924-190-P | 606 | 190 | 50% | 303 | 29×24.2×0.7 5 | X-sec | Top down |
SNS-C14.8-2410-170-P | 675 | 170 | 32% | 218 | 24×10×0.7 | ||
SNS-C14.8-2430-170-P | 675 | 170 | 32% | 218 | 24×30.4×0.7 5 | ||
SNS-C14.3-0808-150-D45-P | 700 | 150 | 47% | 330 | 8×8.3×0.7 | Top down | |
SNS-C14.3-0808-350-D45-P | 700 | 350 | 47% | 330 | 8×8.3×0.7 | Top down | |
SNS-C14.3-0808-150-D55-P | 700 | 150 | 55% | 375 | 8×8.3×0.7 | Top down | |
SNS-C14.3-0808-150-D55-P | 700 | 150 | 55% | 375 | 8×8.3×0.7 | Top down | |
SNS-C12-1212-200-P | 833.3 | 200 | 50% | 416 | 12.5×12.5×0.7 | X-sec | Top down |
SNS-C12-2525-200-P | 833.3 | 200 | 50% | 416 | 25×25×0.7 5 | X-sec | Top down |
SNS-C11.7-1212-200-P | 855 | 200 | 50% | 428 | 12.5×12.5×0.7 | ||
SNS-C11.7-2525-200-P | 855 | 200 | 50% | 428 | 25×25×0.7 5 |
2D nanostamps (rectangular and hexagonal lattice)
型号 | 周期间隔(nm) | 晶体类型 | 槽深 (nm) | 线宽 (nm) | 尺寸 | 型号 |
S2D-24B3-0808-150-P | 700 | rect post | 150 | 260 | 8×8.3×0.7 | Top down |
S2D-24B3-0808-350-P | 700 | rect post | 350 | 260 | 8×8.3×0.7 | Top down |
S2D-18B3-0808-150-P | 700 | rect post | 150 | 350 | 8×8.3×0.7 | Top down |
S2D-18B3-0808-350-P | 700 | rect post | 350 | 350 | 8×8.3×0.7 | Top down |
S2D-24C2-0808-150-P | 600 | hex post | 150 | 165 | 8×8.3×0.7 | Top down |
S2D-24C2-0808-350-P | 600 | hex post | 350 | 165 | 8×8.3×0.7 | Top down |
S2D-18C2-0808-150-P | 600 | hex post | 150 | 240 | 8×8.3×0.7 | Top down |
S2D-18C2-0808-350-P | 600 | hex post | 350 | 240 | 8×8.3×0.7 | Top down |
S2D-24C3-0808-150-P | 700 | hex post | 150 | 220 | 8×8.3×0.7 | Top down |
S2D-24C3-0808-350-P | 700 | hex post | 350 | 220 | 8×8.3×0.7 | Top down |
S2D-18C3-0808-150-P | 700 | hex post | 150 | 290 | 8×8.3×0.7 | Top down |
S2D-18C3-0808-350-P | 700 | hex post | 350 | 290 | 8×8.3×0.7 | Top down |
S2D-24D2-0808-150-P | 600 | hex hole | 150 | 180 | 8×8.3×0.7 | Top down |
S2D-24D2-0808-350-P | 600 | hex hole | 350 | 180 | 8×8.3×0.7 | Top down |
S2D-18D3-0808-150-P | 700 | hex hole | 150 | 200 | 8×8.3×0.7 | Top down |
S2D-18D3-0808-350-P | 700 | hex hole | 350 | 200 | 8×8.3×0.7 | Top down |
S2D-24D3-0808-150-P | 700 | hex hole | 150 | 290 | 8×8.3×0.7 | Top down |
S2D-24D3-0808-350-P | 700 | hex hole | 350 | 290 | 8×8.3×0.7 | Top down |
New nanostamps are added to our stock frequently. Please contact our application scientists if you cannot find a nanostructure you need in our stock list.
如何清洁光栅
为了去除油脂和其他污染物，传输光栅可在室温Liquinox溶液中浸泡不超过5分钟，在三个蒸馏水中漂洗，并使用无油喷嘴用干净干燥的压缩氮气吹干，同时用镊子夹住格栅（不要使用罐上的灰尘，因为其排放物受到高度污染）。切勿让水在格栅表面干燥，应将其吹走。氮气应该来自油箱或无油压缩机
http://www.alconox.com/Resources/TechnicalBulletin.aspx?plid=3
为了在这个过程中固定光栅，可以使用Nalgene™聚丙烯剪刀式镊子。
http://www.thermoscientific.com/en/product/nalgene-polypropylene-scissor-type-forceps.html
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